JPH0452743U - - Google Patents

Info

Publication number
JPH0452743U
JPH0452743U JP9488290U JP9488290U JPH0452743U JP H0452743 U JPH0452743 U JP H0452743U JP 9488290 U JP9488290 U JP 9488290U JP 9488290 U JP9488290 U JP 9488290U JP H0452743 U JPH0452743 U JP H0452743U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9488290U
Other languages
Japanese (ja)
Other versions
JP2515879Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1990094882U priority Critical patent/JP2515879Y2/ja
Publication of JPH0452743U publication Critical patent/JPH0452743U/ja
Application granted granted Critical
Publication of JP2515879Y2 publication Critical patent/JP2515879Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
JP1990094882U 1990-09-10 1990-09-10 基板支持具 Expired - Fee Related JP2515879Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990094882U JP2515879Y2 (ja) 1990-09-10 1990-09-10 基板支持具

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990094882U JP2515879Y2 (ja) 1990-09-10 1990-09-10 基板支持具

Publications (2)

Publication Number Publication Date
JPH0452743U true JPH0452743U (en]) 1992-05-06
JP2515879Y2 JP2515879Y2 (ja) 1996-10-30

Family

ID=31833160

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990094882U Expired - Fee Related JP2515879Y2 (ja) 1990-09-10 1990-09-10 基板支持具

Country Status (1)

Country Link
JP (1) JP2515879Y2 (en])

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63257217A (ja) * 1987-04-15 1988-10-25 Hitachi Ltd 熱処理用治具
JPH01100446U (en]) * 1987-12-23 1989-07-05
JPH0295244U (en]) * 1989-01-13 1990-07-30
JPH03211749A (ja) * 1990-01-13 1991-09-17 Tokyo Electron Ltd 半導体製造装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63257217A (ja) * 1987-04-15 1988-10-25 Hitachi Ltd 熱処理用治具
JPH01100446U (en]) * 1987-12-23 1989-07-05
JPH0295244U (en]) * 1989-01-13 1990-07-30
JPH03211749A (ja) * 1990-01-13 1991-09-17 Tokyo Electron Ltd 半導体製造装置

Also Published As

Publication number Publication date
JP2515879Y2 (ja) 1996-10-30

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Legal Events

Date Code Title Description
R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

LAPS Cancellation because of no payment of annual fees